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No 4 (2024)
Study of SiO2 films implanted with 64Zn+ ions and oxidized at elevated temperatures
Privezentsev V.V., Sergeev A.P., Firsov A.A., Kulikauskas V.S., Zatekin V.V., Kirilenko E.P., Goryachev A.V., Kovalskiy V.A.
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(Rus)
No 5 (2024)
Complex Diagnostics of Silicon-on-Insulator Layers after Ion Implantation and Annealing
Yunin P.A., Drozdov M.N., Novikov A.V., Shmagin V.B., Demidov E.V., Mikhailov A.N., Tetelbaum D.I., Belov A.I.
PDF
(Rus)
No 7 (2024)
The effect of atmospheric oxide thermodesorption on negative-ion atomic and cluster sputtering of silicon single crystal by cesium ions
Atabaev B.G., Djabbarganov R., Khalmatov A.S., Rakhmatov A.Z., Kamardin A.I.
PDF
(Rus)
No 9 (2024)
Determination of the ratio of atoms and molecules in a tellurium beam using a mass spectrometer
Mikhailov V.I., Polyak L.E.
PDF
(Rus)
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