Enviar artigo por via de e-mail FEATURES OF VISUALIZATION OF THE THREE-DIMENSIONAL STRUCTURE OF MESOPOROUS PZT FILMS BY FIB-SEM NANOTOMOGRAPHY
- Autores: Atanova A.V.1, Khmelenin D.N.1, Zhigalina O.M.1,2
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Afiliações:
- Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics,”Russian Academy of Sciences, Moscow, 119333 Russia
- Bauman Moscow State Technical University, Moscow, 107005 Russia
- Edição: Volume 68, Nº 1 (2023)
- Páginas: 105-114
- Seção: ПОВЕРХНОСТЬ, ТОНКИЕ ПЛЕНКИ
- URL: https://ter-arkhiv.ru/0023-4761/article/view/673563
- DOI: https://doi.org/10.31857/S0023476123010046
- EDN: https://elibrary.ru/DMYHLV
- ID: 673563
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Resumo
A technique for studying the three-dimensional structure of porous lead zirconate titanate films by FIB-SEM-nanotomography is presented. Such quantitative characteristics as total porosity, specific surface area, and actual pore size (calculated using the local thickness method) have been obtained. According to the FIB-SEM-nanotomography data, the pore size is 77 ± 33 nm for the film with the PVP porogen and only 27 ± 6 nm for the film with the Brij76 porogen; the latter value is close to the limiting resolution for this method. The final 3D model is shown to be strongly influenced by the chosen ion-beam parameters during milling, which can be varied to obtain a structure without distortion or visualize the accumulation of pores at grain boundaries.
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Sobre autores
A. Atanova
Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics,”Russian Academy of Sciences, Moscow, 119333 Russia
Email: atanova.a@crys.ras.ru
Россия, Москва
D. Khmelenin
Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics,”Russian Academy of Sciences, Moscow, 119333 Russia
Email: atanova.a@crys.ras.ru
Россия, Москва
O. Zhigalina
Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics,”Russian Academy of Sciences, Moscow, 119333 Russia; Bauman Moscow State Technical University, Moscow, 107005 Russia
Autor responsável pela correspondência
Email: atanova.a@crys.ras.ru
Россия, Москва; Россия, Москва
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